Nikon
Precision
Application:
NEST Semiconductor Step and Repeat System
Legacy
Computer: PDP-11/93
Strobe
Solution: Osprey DXp, Custom OEM Chassis
Description
NEST™ (Nikon Enhanced System Technology)
Manager operating system for the company's model 6-10 i- line and g-line
steppers. The software enables focus data collection at each die and statistical
wafer mapping of that data to detect the presence of a particle on the wafer
chuck. The results can be sent to a host computer to automatically stop the lot,
saving considerable rework expense. The newly released NEST Manager upgrade,
which reduces overhead up to 200 percent, offers an improved Windows NT
graphical user interface (GUI) and additional functionality over previous
versions of NEST. These features combined with the improved data processing
capability of NEST, provides customers with increased wafer output from their
existing production capacity. "Nikon Precision is continuing its efforts to
assure the success of its customers by offering upgrades to enhance the
performance and prolong the life of our installed base of imaging systems,"
states Chris Hayden, Nikon's senior manager of after-market operations. "In
addition, our software department is developing other applications similar to
Hot Spot Detection that will identify problems such as alignment shift that lead
to yield loss," he added. NEST Manager monitors
the operation sequence of the imaging tools. Detailed sequence monitoring
information and process parameters are logged into a file for use in analyzing
machine performance, resulting in improved diagnostic capability and more
efficient troubleshooting. NEST also can generate a snapshot of daily process
history, making it possible to easily review machine utilization and throughput.
Nikon Precision Inc. is the North American subsidiary of Nikon Corp., the world
leader in lithography equipment for the microelectronics manufacturing industry
with more than 6,200 units installed worldwide. Nikon offers the most extensive
selection of production-class steppers and scanners in the industry. These
products serve the wafer, photomask, flat panel display, and thin-film magnetic
head industries. Nikon Precision provides service, applications, training,
technical support, sales and marketing for Nikon in